Z.M.SOKHIBOVA. Chemical processing of silicon semiconductor materials and their physical fundamentals . Academic Journal of Science, Technology and Education, [S. l.], v. 1, n. SI1, p. 22–25, 2025. Disponível em: https://integrumpublication.org/index.php/ajste/article/view/122. Acesso em: 9 apr. 2026.